Dynamic secondary ion mass spectroscopy of Au nanoparticles on Si wafer using Bi3+ as primary ion coupled with surface etching by Ar cluster ion beam: The ¡¦
Eun Ji Park, Chang Min Choi, Il Hee Kim, Jung-Hwan Kim, Gaehang Lee, Jong Sung Jin, Gerd Ganteför, Young Dok Kim, Myoung Choul Choi, Journal of Applied Physics 123 (2018) 015303